Authors: Pingyu Jiang, Xuesong Qi
Addresses: State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China. ' CAD/CAM Institute, School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
Abstract: In this paper, we put forward a kind of e-service-driven process-planning methodology to support the |top-down| design flow of microcomponents. Some key enabling techniques, such as sectioning different types of layers, sequencing the |process| flow, itemising the |operation| set of each |process| and generating masks, are described in detail. Moreover, a process-planning prototype is developed on the basis of Java-oriented architecture. Finally, a running example related to micromirror is presented so as to verify the above methodology and the correspondent enabling techniques.
Keywords: process planning; CAPP; micromanufacturing; e-services; rules; resource databases; mask generation; geometric reasoning; silicon surfaces; design flow; micromirrors; silicon substrate microcomponents.
International Journal of Manufacturing Technology and Management, 2007 Vol.10 No.4, pp.429 - 439
Published online: 25 Jan 2007 *Full-text access for editors Access for subscribers Purchase this article Comment on this article