Title: Fabrication of diamond thin films with high quality on microcylindrical substrates

Authors: Yuping Ma, Ming Chen, Daohui Xiang, Fanghong Sun

Addresses: School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200030, P.R. China. ' School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200030, P.R. China. ' School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200030, P.R. China. ' School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200030, P.R. China

Abstract: The study on deposition of diamond thin films on tungsten wire substrate with a gas mixture of acetone and hydrogen by using bias-enhanced hot filament CVD with the tantalum wires being optimised was carried out. The quality of the diamond film was tested by Scanning Electron Microscopy (SEM) and Raman spectroscopy. The effect of deposition technology on the nucleation and growth of diamond crystals was analysed. The results show that the cylindrical diamond thin films with good quality and uniform thickness have been obtained on microtungsten wires, which laid a foundation for subsequent fabrication of self-supported diamond tubes and deposition of diamond coatings on the rotating tools.

Keywords: diamond thin films; bias enhanced HFCVD; hot filament CVD; microcylindrical substrates; high quality; fabrication; characterisation; distance; uniformity; optimisation technology; crystallographic orientation; nanomanufacturing; tungsten wire substrates; diamond tubes; deposition; diamond coatings; rotating tools; deposition; nucleation; growth; diamond crystals.

DOI: 10.1504/IJNM.2006.011381

International Journal of Nanomanufacturing, 2006 Vol.1 No.1, pp.74 - 82

Published online: 29 Nov 2006 *

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