Title: Nanofinishing of silicon nitride workpieces using magnetorheological abrasive flow finishing

Authors: Sunil Jha, Vijay Kumar Jain

Addresses: Department of Mechanical Engineering, IIT Kanpur 208016, India. ' Department of Mechanical Engineering, IIT Kanpur 208016, India

Abstract: Magnetorheological Abrasive Flow Finishing (MRAFF) process was developed for deterministic finishing of internal and external surfaces by extruding magnetically stiffened magnetorheological abrasive polishing fluid. Silicon nitride is a brittle and hard, difficult-to-machine ceramic. Obtaining final surface finish in nanometer range and defect free surface is a challenge for manufacturing scientists. The finishing of silicon nitride workpieces was done using boron carbide, silicon carbide and diamond. The effectiveness of different abrasives was investigated and surface topography was observed under atomic force microscope.

Keywords: magnetorheological finishing; silicon nitride; nanofinishing; abrasive flow finishing; magnetic field assisted finishing; internal finishing; MRAFF; ceramics; surface finishing; boron carbide; silicon carbide; diamond; surface quality; surface roughness; nanomanufacturing.

DOI: 10.1504/IJNM.2006.011376

International Journal of Nanomanufacturing, 2006 Vol.1 No.1, pp.17 - 25

Published online: 29 Nov 2006 *

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