Title: One-photon absorption based direct laser writing for fabrication of multi-dimensional photonic and plasmonic nanostructures

Authors: Mao Fei; Pham Thi Nhung; Nguyen Binh Minh; Li Zhen; Au Thi Huong; Nguyen Dam Thuy Trang; Tong Quang Cong; Pham Thi Lien; Nguyen Thanh Huong; Tran Quoc Tien; Lai Ngoc Diep

Addresses: Laboratoire Lumière, Matière et Interfaces, FRE 2036, École Normale Supérieure Paris-Saclay, Centrale Supélec, CNRS, Université Paris-Saclay, 4 Avenue des Sciences, 91190 Gif-sur-Yvette, France ' Laboratoire Lumière, Matière et Interfaces, FRE 2036, École Normale Supérieure Paris-Saclay, Centrale Supélec, CNRS, Université Paris-Saclay, 4 Avenue des Sciences, 91190 Gif-sur-Yvette, France ' Laboratoire Lumière, Matière et Interfaces, FRE 2036, École Normale Supérieure Paris-Saclay, Centrale Supélec, CNRS, Université Paris-Saclay, 4 Avenue des Sciences, 91190 Gif-sur-Yvette, France ' Laboratoire Lumière, Matière et Interfaces, FRE 2036, École Normale Supérieure Paris-Saclay, Centrale Supélec, CNRS, Université Paris-Saclay, 4 Avenue des Sciences, 91190 Gif-sur-Yvette, France ' Laboratoire Lumière, Matière et Interfaces, FRE 2036, École Normale Supérieure Paris-Saclay, Centrale Supélec, CNRS, Université Paris-Saclay, 4 Avenue des Sciences, 91190 Gif-sur-Yvette, France ' Laboratoire Lumière, Matière et Interfaces, FRE 2036, École Normale Supérieure Paris-Saclay, Centrale Supélec, CNRS, Université Paris-Saclay, 4 Avenue des Sciences, 91190 Gif-sur-Yvette, France ' Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet, Cau Giay, Hanoi 100000, Vietnam ' Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet, Cau Giay, Hanoi 100000, Vietnam ' Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet, Cau Giay, Hanoi 100000, Vietnam ' Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet, Cau Giay, Hanoi 100000, Vietnam ' Laboratoire Lumière, Matière et Interfaces, FRE 2036, École Normale Supérieure Paris-Saclay, Centrale Supélec, CNRS, Université Paris-Saclay, 4 Avenue des Sciences, 91190 Gif-sur-Yvette, France

Abstract: We have successfully demonstrated a simple and low-cost fabrication technique, called direct laser writing (DLW), for realisation of photonic and plasmonic nanostructures. First, based on low one-photon absorption (LOPA) phenomena in a weakly absorbing photoresist (532 nm laser vs. SU8 or S18 photoresist), this DLW enabled production of submicrometre 2D and 3D photonic structures on demand using a very modest laser power. We also demonstrated that the LOPA based DLW allowed embedding a single nanoparticle (fluorescent, nonlinear, magnetic, or metallic nature) in a desired position of polymeric photonic structures. Second, by using optically induced local thermal effect, the DLW allowed us to directly fabricate plasmonic nanostructures on gold and/or silver films. Different applications of these fabricated photonic and plasmonic structures could be envisioned, and partially realised, such as tunable photonic devices, data storage, bright single photon source, quantum information, plasmonic data storage, and colour nanoprinter.

Keywords: direct laser writing; one-photon absorption; photonic crystals; plasmonics; magnetic devices; quantum optics.

DOI: 10.1504/IJNT.2020.111325

International Journal of Nanotechnology, 2020 Vol.17 No.7/8/9/10, pp.550 - 559

Published online: 20 Nov 2020 *

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