Title: Development of quartz resonant sensors using FEM

Authors: Christian Reichinger

Addresses: TU Munchen, Lehrstuhl fur Elektrische Mebtechnik, W-80290 Munchen, Germany

Abstract: The design of vibrating quartz sensors for force or pressure measurement is a problem that can only be solved by computer simulation. One possibility is the use of finite element analysis, but the multitude and variety of the effects that must be considered make the analysis difficult. The FEM program must be able to compute the piezoelectric coupling between the electric stimulation and the mechanical vibration in anisotropic bodies, a dynamic problem. The determination of the force vs. frequency characteristic requires the implementation of the acoustoelastic effect, which describes the change of the elastic wave velocity as a function of mechanical stress. The expansion of the standard FEM program ANSYS with special user routines makes the investigation, design and optimisation of quartz resonant sensors possible.

Keywords: acoustoelastic effect; finite element method; FEM; piezoelectric simulation; quartz resonant sensors; quartz sensors; anisotrophy; ANSYS; simulation.

DOI: 10.1504/IJCAT.1994.062533

International Journal of Computer Applications in Technology, 1994 Vol.7 No.3/4/5/6, pp.292 - 299

Published online: 09 Jun 2014 *

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