On-chip electrometer using MEMS parallel-plate pull-in sensing Online publication date: Fri, 22-Jun-2007
by Russell Y. Webb, Noel C. MacDonald
International Journal of Intelligent Systems Technologies and Applications (IJISTA), Vol. 3, No. 1/2, 2007
Abstract: Microelectromechanical Systems (MEMS) have been proposed as DC electrical metrology references. The design reported here is the first to enhance the qualities of a MEMS DC reference with potential tuning and sensing via an isolated and monolithically integrated MEMS technology and thereby, convert a stable parallel-plate voltage reference to a simple, sensitive, low-burden voltage sensor. This on-chip system reliably measures unknown potentials ranging from −60 to 60V with sampling times less than 10 ms. In the initial design, the system is used to measure atto-amp leakage current though 10 PΩ, suspended, MEMS isolation.
Online publication date: Fri, 22-Jun-2007
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Intelligent Systems Technologies and Applications (IJISTA):
Login with your Inderscience username and password:
Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.
If you still need assistance, please email email@example.com