On-chip electrometer using MEMS parallel-plate pull-in sensing
by Russell Y. Webb, Noel C. MacDonald
International Journal of Intelligent Systems Technologies and Applications (IJISTA), Vol. 3, No. 1/2, 2007

Abstract: Microelectromechanical Systems (MEMS) have been proposed as DC electrical metrology references. The design reported here is the first to enhance the qualities of a MEMS DC reference with potential tuning and sensing via an isolated and monolithically integrated MEMS technology and thereby, convert a stable parallel-plate voltage reference to a simple, sensitive, low-burden voltage sensor. This on-chip system reliably measures unknown potentials ranging from −60 to 60V with sampling times less than 10 ms. In the initial design, the system is used to measure atto-amp leakage current though 10 PΩ, suspended, MEMS isolation.

Online publication date: Fri, 22-Jun-2007

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