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Nanomechanical study of amorphous and polycrystalline ALD HfO2 thin films
K. Tapily, J.E. Jakes, D. Gu, H. Baumgart, A.A. Elmustafa
International Journal of Surface Science and Engineering (IJSURFSE), 2011 Vol.5 No.2/3, pp.193 - 204
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