Title: Fabrication, characterisation and modelling of fast flexible semiconductor nanomembrane electronics

Authors: Guoxuan Qin; Guoping Tu; Tianhao Cai; Jianguo Ma; Zhenqiang Ma

Addresses: School of Electronic Information Engineering, Tianjin University, Tianjin, 300072, China ' School of Electronic Information Engineering, Tianjin University, Tianjin, 300072, China ' School of Electronic Information Engineering, Tianjin University, Tianjin, 300072, China ' School of Electronic Information Engineering, Tianjin University, Tianjin, 300072, China ' Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, WI 53706, USA

Abstract: The novel properties of micro- and nanomembranes (e.g., flexible, stretchable, transferable, lightweight, capability of covering large area) offer great opportunities for a variety of new applications in electronics, photonics, microelectromehanical systems (MEMS), and other areas. This paper reviews the material fabrication and representative transfer techniques of nanomembranes for versatile functionalities. Characterisation and modelling of fast flexible nanoelectronics are reviewed: from individual devices such as thin-film transistors, diodes to circuits such as RF switches. This paper provides an overview of the fast flexible nanoelectronics based on transferable nanomembranes and indicates possible directions of semiconductor nanomembranes for exciting new science and nanotechnology.

Keywords: diodes; flexible electronics; high speed nanoelectronics; microwave; modelling; nanomembrane electronics; plastic substrate; radio frequency; RF switches; TFT; thin film transistors; nanoelectronics; nanotechnology; semiconductor fabrication; photonics; MEMS; microelectromehanical systems; semiconductor nanomembranes.

DOI: 10.1504/IJNT.2014.059822

International Journal of Nanotechnology, 2014 Vol.11 No.1/2/3/4, pp.190 - 206

Available online: 14 Mar 2014 *

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