Title: In-situ machining of varied-shaped and arrays of microelectrodes using reverse micro-electrodischarge machining

Authors: M.P. Jahan; Y.S. Wong; M. Rahman; T.W. Liang

Addresses: Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR 72701, USA. ' Department of Mechanical Engineering, National University of Singapore, Singapore 117576, Singapore. ' Department of Mechanical Engineering, National University of Singapore, Singapore 117576, Singapore. ' Department of Mechanical Engineering, National University of Singapore, Singapore 117576, Singapore

Abstract: Present study aims to investigate the feasibility of in-situ machining varied-shaped and arrays of microelectrodes using reverse micro-EDM. The technique aims to machine holes or varied structures in a foil using conventional micro-EDM, and then reversing the polarity of the conventional micro-EDM set-up to use the foil to fabricate microelectrodes. The advantages of this technique are its relative low cost of setup, its machining speed, as well as the potential for there not to be any dimensional restrictions. The effect of different machining parameters during the process and selection of optimum machining parameters were explored for each stage of the reverse micro-EDM process. Finally, a 2 × 2 micro-punch array with single microelectrode diameter of 50 µm was successfully fabricated out of a 500 µm diameter tungsten carbide electrode using a 200 µm thick copper foil. In addition, microelectrodes with varied shapes have been machined using reverse micro-EDM.

Keywords: reverse micro EDM; varied-shaped microelectrodes; microelectrode arrays; on-machine electrode fabrication; electro-discharge machining; electrical discharge machining.

DOI: 10.1504/IJMMS.2012.049975

International Journal of Mechatronics and Manufacturing Systems, 2012 Vol.5 No.5/6, pp.495 - 515

Received: 05 Aug 2011
Accepted: 10 Apr 2012
Published online: 21 Aug 2014 *

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