Title: Use of ELID-grinding on brittle-hard materials

Authors: Rolf Rascher; Igor Makarenko

Addresses: University of Applied Sciences Deggendorf, Edlmairstrasse 6+8, D-94469 Deggendorf, Germany. ' Hermann-Gmeiner-Weg 5, D-94327 Bogen, Germany

Abstract: Electrolytic in-process dressing (ELID) is a grinding technology which enables to manufacture surfaces in a quality that is close to polished on advanced, brittle-hard materials such as used in optics. ELID grinding requires exactly aligned machining parameters of the grinding process. Sapphire is, due to its crystal structure, difficult to machine. There is a request for thin, i.e., below 0.2 mm thickness, sub-surface damage free wafers. To grind sapphire, the material|s behaviour is to be considered. Studies on the necessary oxide layer on the ELID grinding wheel and influences on its build-up process will be presented. In-feed and grinding velocity are varied and the results on wear, removal rate and surface quality are shown. The influence of the coolant and the stiffness of the machine, the grinding forces and pressure are evaluated. The ELID grinding is compared to conventional grinding. The achieved excellent surface roughness on sapphire is discussed.

Keywords: electrolytic in-process dressing; ELID grinding; surface roughness; thin wafers; sapphire grinding; sintered silicon carbide; coolant; surface quality; optics; brittle materials; oxide layers; tool wear; material removal rate; MRR; machine stiffness; grinding forces; pressure.

DOI: 10.1504/IJMMS.2011.044105

International Journal of Mechatronics and Manufacturing Systems, 2011 Vol.4 No.6, pp.553 - 568

Received: 06 Oct 2010
Accepted: 15 Nov 2010
Published online: 07 Mar 2015 *

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