Title: Development of a metrology frame to improve the positioning accuracy of Micro/Meso-scale Machine Tools

Authors: Shawn Moylan, Daehie Hong, Bradley N. Damazo, Johannes Soons, Alkan Donmez

Addresses: National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899, USA. ' Department of Mechanical Engineering, Korea University, Seoul, 136-701, Korea. ' National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899, USA. ' National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899, USA. ' National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899, USA

Abstract: The small work volumes of Micro/Meso-scale Machine Tools (MMMTs) often present problems for calibration and error compensation, but also allow solutions not practical on the traditional scale. Measuring tool position with a separate metrology frame and compensating for error motions is one such solution. The metrology frame design follows principles of precision design and allows measurement of the position of the tool tip with respect to the workpiece while minimising Abbe errors. Kinematic analysis provides the relationship between metrology frame measurements and machine tool coordinates. Error analysis reveals that sensor error has the only first order influence on measurement accuracy.

Keywords: metrology frame; MMMTs; micro/meso-scale machine tools; micromanufacturing; micromachining; Abbe offset errors; Abbe alignment principle; kinematic design; calibration; positioning accuracy; error compensation.

DOI: 10.1504/IJMMS.2009.028083

International Journal of Mechatronics and Manufacturing Systems, 2009 Vol.2 No.5/6, pp.600 - 619

Published online: 03 Sep 2009 *

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