Title: Detection and classification of volatile organic compounds using Indium Tin Oxide sensor array and artificial neural network

Authors: H.J. Pandya

Addresses: Instrument Design Development Centre, Indian Institute of Technology, Hauz Khas, New Delhi 110016, India

Abstract: This article reveals the novel approach of fabricating Indium Tin Oxide thin films grown on glass substrate at 648 K temperatures using direct evaporation method for detection of small concentration volatile organic compounds (VOCs) and their mixture. These thin film sensors were used in array for identifying mixtures of VOCs. The VOCs and their mixture were identified with 96% accuracy.

Keywords: ANNs; artificial neural networks; ITO thin films; indium tin oxide; thin film sensors; sensor arrays; VOCs; volatile organic compounds; direct evaporation; VOC mixtures.

DOI: 10.1504/IJISTA.2009.025107

International Journal of Intelligent Systems Technologies and Applications, 2009 Vol.7 No.1, pp.72 - 79

Published online: 12 May 2009 *

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