Title: Implementing an integrated framework for internal logistics management in automated semiconductor manufacturing

Authors: Jairo R. Montoya-Torres, Jean-Pierre Campagne, Gloria Rodriguez

Addresses: Escuela Internacional de Ciencias Economicas y Administrativas, Universidad de La Sabana, km 21 autopista norte de Bogota, Chía (Cundinamarca), Colombia. ' Laboratoire d'Informatique pour l'Entreprise et les Systemes de Production (LIESP), Institut National des Sciences Appliquees (INSA) de Lyon, Batiment Jules Verne, 19 avenue Jean Capelle, F-69621, Villeurbanne, France. ' Departamento de Procesos Productivos, Pontificia Universidad Javeriana, Carrera 7, No. 40-62, Bogota, Colombia

Abstract: Nowadays, productivity and ergonomic reasons impose the use of Automated Material Handling Systems (AMHS) to transfer work-in-process within modern semiconductor factories. It is necessary to manage the AMHS to attain high throughput and short cycle times. Traditional simulation-based models considered the AMHS as an isolated system and do not provide formal modelling approaches necessary for its efficient reuse and management. This paper studies the implementation of a global modelling framework for the operational behaviour of wafer factories by using an efficient AMHS control policy.

Keywords: operational logistics; transportation systems; integrated modelling; simulation; framework; semiconductor manufacturing; internal logistics; logistics management; automated materials handling systems; AMHS control; wafer factories.

DOI: 10.1504/IJLSM.2009.022505

International Journal of Logistics Systems and Management, 2009 Vol.5 No.3/4, pp.418 - 435

Available online: 10 Jan 2009 *

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