Title: Static and dynamic evaluation of Silicon-On-Insulator-based scanning micromirrors

Authors: Jianliang You, Avinash K. Bhaskar, Muthukumaran Packirisamy, Rama B. Bhat

Addresses: Optical Microsystems Laboratory, CONCAVE Research Centre, Department of Mechanical and Industrial Engineering, Concordia University, 1455 de Maisonneuve Boulevard West, Montreal H3G 1M8, Canada. ' Optical Microsystems Laboratory, CONCAVE Research Centre, Department of Mechanical and Industrial Engineering, Concordia University, 1455 de Maisonneuve Boulevard West, Montreal H3G 1M8, Canada. ' Optical Microsystems Laboratory, CONCAVE Research Centre, Department of Mechanical and Industrial Engineering, Concordia University, 1455 de Maisonneuve Boulevard West, Montreal H3G 1M8, Canada. ' Optical Microsystems Laboratory, CONCAVE Research Centre, Department of Mechanical and Industrial Engineering, Concordia University, 1455 de Maisonneuve Boulevard West, Montreal H3G 1M8, Canada

Abstract: Microfabricated Silicon-On-Insulator (SOI) optical micromirrors are often used in switching applications due to their high reflectivity and low residual stress. In the present study, an industrial bulk micromachining technology based on SOI wafer called the MicraGEM SOI technique is used to fabricate the micromirror. Further, analytical studies were carried out for the static and dynamic characteristics, and are validated using experimental results. A test set-up comprising a laser source and Laser Doppler Vibrometer (LDV) was used for dynamic testing. The microfabrication and test method proposed are simple and can be used to study optical micromirrors of any size.

Keywords: electrostatic performance; microfabrication; resonant frequency; scanning micromirrors; silicon-on-insulator; SOI wafers; vibrometers; switching applications; bulk micromachining; statics; dynamics; optical micromirrors.

DOI: 10.1504/IJISTA.2008.018173

International Journal of Intelligent Systems Technologies and Applications, 2008 Vol.5 No.1/2, pp.185 - 200

Available online: 05 May 2008 *

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