Title: A novel approach for intelligent introduction of optimal system error in spatial carrier technology

Authors: Jiaxing Sun; Zhiping Fan; Zhisong Li

Addresses: School of Mechanical Engineering, Shanghai Dianji University, No. 300 Shuihua Road, Xincheng District, Nanhui, Pudong New Area, Shanghai, 201316, China ' Donghua University, 2999 North Renmin Road, Songjiang District, Shanghai, 201620, China ' School of Mechanical Engineering, Shanghai Dianji University, No. 300 Shuihua Road, Xincheng District, Nanhui, Pudong New Area, Shanghai, 201316, China

Abstract: The spatial carrier phase-shifting technology is a reliable method in the field of optical surface measurement. However, the introduction of appropriate systematic errors has always been an important issue in achieving the best detection accuracy. To address this, a method for intelligent introduction of optimal system error is proposed in this article. This method estimates the PV value of the test mirror and assumes that the weight of the system retrace error is equal to the PV value of the test mirror, thereby introducing different carrier amounts for different specifications of test mirrors. This method effectively controls the systematic error within a reasonable range, thereby improving the accuracy and efficiency of surface shape detection. Experimental results show that compared with the traditional fixed fringe method in spatial carrier technology, this method improves the detection accuracy of flat mirrors by approximately 10% and that of regular mirrors by approximately 15%.

Keywords: intelligent computing; laser interferometry; surface shape measurement; spatial carrier phase-shifting; carrier fringes; adaptive dynamic detection; Fourier transform; retrace error.

DOI: 10.1504/IJISTA.2023.134988

International Journal of Intelligent Systems Technologies and Applications, 2023 Vol.21 No.4, pp.402 - 416

Received: 04 Mar 2023
Accepted: 23 Apr 2023
Published online: 23 Nov 2023 *

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