Principle and applications of MEMS: a review

		Searching 29635 from 294 Journals [Advanced Search ] Search in
		Login

	PUBLISHERS OF DISTINGUISHED ACADEMIC, SCIENTIFIC AND PROFESSIONAL JOURNALS
Home About Us Contact Us Site Map Help

Article Abstract

	Title:	Principle and applications of MEMS: a review
	Author:	N.P. Mahalik
	Address:	Department of Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong Dong, Buk Gu, Gwangju 500 712, South Korea
	Journal:	International Journal of Manufacturing Technology and Management 2008 - Vol. 13, No.2/3/4 pp. 324 - 343
	Abstract:	Design for miniaturisation represents a broad research topic with applications in fundamental physics, chemistry, martial science, computing methods, ultra-precision engineering, fabrication technology and micromachining based on the principles, characterisation, modelling, simulation and state-of-the-art technology. This paper presents a review on the research and developmental aspects of Microelectromechanical Systems (MEMS). MEMS is relatively a recent development which can be used in a variety of industrial as well as consumer product applications where IC-based technology fails. The review will enable the readers to understand the underlying technology, philosophy, concepts, ideas and principles including micromanufacturing, lithography, bulk and surface micromachining, microsensors, microactuators, Microopto Electromechanical Systems (MOEMS), RF MEMS, Nanoelectro Mechanical Systems (NEMS), microfluidics and BioMEMS. Aspects of microsystems in terms of design process, practice and techniques are presented.
	Keywords:	MEMS; fabrication; integrated circuits; NEMS; LIGA; modelling; microelectromechanical systems; micromanufacturing; lithography; bulk micromachining; surface micromachining; microsensors; microactuators; microoptoelectromechanical systems; MOEMS; RF MEMS; nanoelectromechanical systems; microfluidics; bioMEMS; microsystems.
	DOI:	10.1504/IJMTM.2008.016780
		Purchase this Paper Comment on the Paper

Article's references with DOI links: