Stress effects on solid-state dewetting of nano-thin films
by F. Cheynis; E. Bussmann; F. Leroy; T. Passanante; P. Müller
International Journal of Nanotechnology (IJNT), Vol. 9, No. 3/4/5/6/7, 2012

Abstract: In this paper, we present a brief survey of stress effects on dewetting. For this purpose, i) we develop a simple thermodynamic model to illustrate stress effects; ii) we study stress effects in strained-Silicon-On-Insulator (s-SOI) thin films by means of Low Energy Electron Microscopy, and Atomic Force Microscopy; iii) we discuss some available data. In particular, we show that while for s-SOI the strain only provides a relatively small contribution to the total driving force for dewetting, in some other cases stress can really dominate the driving force for the dewetting.

Online publication date: Mon, 06-Feb-2012

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