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Fusion of metrology data for large-scale high-volume manufacturing of polymer-based microfluidic devices
Vijay Shilpiekandula, Daniel J. Burns, Shiguang Li, Zhiguang Xu, Hayden K. Taylor, Kamal Youcef-Toumi, Zhongping Fang, Ivan Reading, Soon Fatt Yoon
International Journal of Nanomanufacturing (IJNM), 2009 Vol.3 No.4, pp.312 - 336
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