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Elasto-plastic characterisation of low-temperature plasma-deposited silicon nitride thin films using nanoindentation
Mariusz Martyniuk, Charles A. Musca, John M. Dell, Robert G. Elliman, Lorenzo Faraone
International Journal of Surface Science and Engineering (IJSURFSE), 2009 Vol.3 No.1/2, pp.3 - 22
19 - 18 =

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