Article: Preparation of nano-In2O3 thin films by spray pyrolysis for gas sensing application Journal: International Journal of Nanoparticles (IJNP) 2013 Vol.6 No.1 pp.1 - 9 Abstract: We report preparation of nano-In2O3 thin films by a simple, inexpensive spray pyrolysis (SP) method and their gas sensing application. Nano-In2O3 thin films were prepared by using indium trichloride in de-ionised water as a precursor at substrate temperature 350°C. As-prepared In2O3 thin films were used for further characterisation after annealing at temperature 550°C for 30 min. The structural and surface morphological properties of the films were studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. These films were tested to various gases at different operating temperature ranging from 50°C to 450°C. A high value of sensitivity is obtained for ethanol at operating temperature of 350°C for 80 ppm. The mechanism of ethanol sensing by the In2O3 thin film is explained on the basis of adsorbed oxygen on the sensor surface. The In2O3 thin films exhibited good sensitivity and rapid response-recovery characteristics to ethanol. Inderscience Publishers - linking academia, business and industry through research

Title: Preparation of nano-In₂O₃ thin films by spray pyrolysis for gas sensing application

Authors: K.K. Thakur; D.V. Ahire; V.B. Gaikwad; G.E. Patil; D.D. Kajale; G.H. Jain

Addresses: Material Science Laboratory, K.T.H.M. College, Nasik 422 002, India ' Material Science Laboratory, K.T.H.M. College, Nasik 422 002, India ' Material Science Laboratory, K.T.H.M. College, Nasik 422 002, India ' Material Science Laboratory, Arts, Commerce and Science College, Nandgaon 423 106, India ' Material Science Laboratory, Arts, Commerce and Science College, Nandgaon 423 106, India ' Material Science Laboratory, Arts, Commerce and Science College, Nandgaon 423 106, India

Abstract: We report preparation of nano-In₂O₃ thin films by a simple, inexpensive spray pyrolysis (SP) method and their gas sensing application. Nano-In₂O₃ thin films were prepared by using indium trichloride in de-ionised water as a precursor at substrate temperature 350°C. As-prepared In₂O₃ thin films were used for further characterisation after annealing at temperature 550°C for 30 min. The structural and surface morphological properties of the films were studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. These films were tested to various gases at different operating temperature ranging from 50°C to 450°C. A high value of sensitivity is obtained for ethanol at operating temperature of 350°C for 80 ppm. The mechanism of ethanol sensing by the In₂O₃ thin film is explained on the basis of adsorbed oxygen on the sensor surface. The In₂O₃ thin films exhibited good sensitivity and rapid response-recovery characteristics to ethanol.

Keywords: spray pyrolysis; In2O3 thin films; indium oxide; ethanol vapour sensors; gas sensing; microstructure; surface morphology; ethanol sensing.

DOI: 10.1504/IJNP.2013.051904

International Journal of Nanoparticles, 2013 Vol.6 No.1, pp.1 - 9

Received: 18 Feb 2011
Accepted: 19 Oct 2011
Published online: 31 Mar 2014 *

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Title: Preparation of nano-In₂O₃ thin films by spray pyrolysis for gas sensing application