Title: Design and simulation of a nano-scale micro positioning stage

Authors: Xie Xiaohui, Du Ruxu, Sun Qiang

Addresses: Shenzhen Institute of Advanced Integration Technology, Chinese Academy of Sciences, and The Chinese University of Hong Kong, China. ' Shenzhen Institute of Advanced Integration Technology, Chinese Academy of Sciences, and The Chinese University of Hong Kong, China. ' Shenzhen Institute of Advanced Integration Technology, Chinese Academy of Sciences, and The Chinese University of Hong Kong, China

Abstract: Micro positioning stage is a commonly used platform for MEMS. In this article, we present a new micro positioning stage including its design, simulation and optimisation. The new micro positioning stage is made of four sets of two leaf springs. The geometric dimensions are determined by optimisation. Its performance, including stress and displacement, is evaluated using finite element analysis by ANSYS. The simulation results indicated that the new design can reliably achieve nano position accuracy.

Keywords: leaf springs; micropositioning; optimisation; simulation; system identification; MEMS; microelectromechanical systems; stress; displacement; finite element analysis; FEA; nanopositioning; positioning accuracy.

DOI: 10.1504/IJMIC.2009.027019

International Journal of Modelling, Identification and Control, 2009 Vol.7 No.1, pp.15 - 19

Published online: 13 Jul 2009 *

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