Title: In situ geometric measurement of microchannels on EN31 steel by laser micromachining using confocal sensor

Authors: Ashish Kumar Sahu; Faiz Iqbal; Aman Kumar; Sunil Jha

Addresses: Department of Mechanical Engineering, Indian Institute of Technology Delhi, New Delhi, 110016, India ' Department of Mechanical Engineering, Indian Institute of Technology Delhi, New Delhi, 110016, India ' Department of Mechanical Engineering, Indian Institute of Technology Delhi, New Delhi, 110016, India ' Department of Mechanical Engineering, Indian Institute of Technology Delhi, New Delhi, 110016, India

Abstract: Laser micromachining is a prominent method of fabricating microchannels on a wide range of metals, non-metals, and polymers for biomedical, chemical, fuel-cell applications for flow of liquids and gases in predefined path for microfluidic systems. In situ measurement of precise geometrical features on fabricated channels is required to avoid systematic errors. The geometrical parameters such as width, depth, aspect ratio of microchannels are the most important attributes which greatly influence quality of microchannels. This paper proposes in situ measurement of fabricated microchannels on EN-31 steel using LMM by integrating confocal sensor with micromachining system. Geometrical features have been measured with confocal sensor which is further employed to evaluate aspect ratio (AR). Obtained results are compared with microscopic images of the samples for geometrical features. Confocal sensor used to measure surface roughness. 3D profilometer is used to analyse MRR (based on measured cross section area) and oxidised zone width surrounded to microchannel.

Keywords: laser micromachining; LMM; microchannel; in-situ measurement; confocal sensor; aspect ratio; metal removal rate; MRR; oxidation zone.

DOI: 10.1504/IJPTECH.2019.100948

International Journal of Precision Technology, 2019 Vol.8 No.2/3/4, pp.429 - 445

Received: 16 Jul 2018
Accepted: 27 Feb 2019
Published online: 19 Jul 2019 *

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