Hybrid gas sensor having TiO₂ nanotube arrays and SnO₂ nanoparticles
by I. Kim; W-Y. Choi
International Journal of Nanotechnology (IJNT), Vol. 14, No. 1/2/3/4/5/6, 2017

Abstract: To obtain a good performance of gas detection, a newly-designed metal oxide semiconductor gas sensor has been fabricated by micromachining process. The micro platform consisted of Pt heater and electrode and its size was 2.5 mm × 2.5 mm. For hybrid sensing materials, such as SnO₂ nanoparticles and TiO₂ nanotube arrays were deposited on the micro platform. To obtain a clean and open window of TiO₂ nanotube, two-step anodic oxidation was conducted. The diameter of window and length of TiO₂ nanotubes were ∼60 nm and ∼5.5 µm, respectively. Detection performances for CO and CH₄ gases were investigated with operation circuit at operating temperature of 100°C and 300°C, respectively. The power consumption of fabricated micro platform was 28 mW and 94 mW at 2 V and 4 V of heater voltages, respectively. High sensitivity and short response time were observed. The microstructures of gas sensor were systemically characterised by FESEM and X-ray diffraction patterns.

Online publication date: Fri, 24-Feb-2017

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