Microstructure and mechanical properties of chromium thin film implanted with nitrogen ions
by Mehdi Manouchehrian; Majid Mojtahedzadeh Larijani; Bahman Banagar
International Journal of Surface Science and Engineering (IJSURFSE), Vol. 9, No. 5, 2015

Abstract: Chromium films were deposited on 304 stainless steel using the hollow cathode discharge (HCD) method. The films were implanted with nitrogen ions at fluences of (1-3-5-7-10) × 10¹⁷ ions/cm² and energy of 45 keg. The structure and surface topography of the implanted films were studied by X-ray diffraction (XRD) and atomic force microscopy (AFM). The mechanical properties of the implanted films were investigated for micro-hardness, friction coefficient, and wear resistance. XRD results showed that fluencies of up to 7 × 10¹⁷ ions/cm² did not cause formation of a CrN phase, but at 10 × 10¹⁷ ions/cm², CrN and Cr₂N phases were formed. AFM images indicated that increasing grain size increased roughness. As fluence increased, hardness and Young's modulus increased because of the formation the CrN and Cr₂N phases. The friction coefficient results showed that, as fluence increased, the friction coefficient decreased. The results showed that increasing the fluence of nitrogen ion implantation changed the type of wear from abrasion to soft.

Online publication date: Wed, 30-Sep-2015

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