Fabrication of finlike thin-film transistors by solution-processed zinc oxide and nanoimprint lithography Online publication date: Thu, 04-Dec-2014
by H.J.H. Chen; S.T. Liu; S.Z. Chen
International Journal of Nanotechnology (IJNT), Vol. 12, No. 1/2, 2015
Abstract: This study addresses on the characteristics of transparent thin-film transistors, TTFTs, with finlike channels fabricated by the solution-processed ZnO and UV nanoimprint lithography. The proposed TTFTs exhibited better output drain current, ON/OFF current ratio, sub-threshold swing and field-effect mobility than that with the single channel one. The device performances with respect to line width/space (l/s) ratio of finlike channels were also studied. With this approach, the low cost and high performance TTFTs can be fabricated for future flat-panel display applications.
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