Intrinsic I-V and C-V characteristics of ultra-thin oxide MOS (p) and MOS (n) structures under deep depletion
by Yu-Ching Liao; Jenn-Gwo Hwu
International Journal of Nanotechnology (IJNT), Vol. 12, No. 1/2, 2015

Abstract: Ultra-thin oxide MOS (p) and MOS (n) capacitors were used in this study to discuss their intrinsic I-V and C-V characteristics under deep depletion. Through deep depletion analysis proposed by Cheng and Hwu [1], we found that the gate leakage current of MOS (p) was perimeter-dependent while MOS (n) was area-dependent. These suggest a strong indication of Schottky barrier height lowering for holes in MOS (p) owing to larger voltage drop on oxide at edge region as the result of fringing field effect [2]. Furthermore, MOS (p) and MOS (n) were put under illumination to investigate the non-uniform movement of minority carriers. As expected, minority carriers of MOS (n) have shorter response time because of comprehensive tunnelling current comparing to MOS (p). A thorough understanding of MOS (p) and MOS (n) under deep depletion was presented. In addition, deep depletion as a tool to investigate the oxide quality was demonstrated.

Online publication date: Thu, 04-Dec-2014

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