Energy and exergy analyses of atomic layer deposition of Al₂O₃ nano-film process
by Tao Li; Fenfen Wang; Hong-Chao Zhang; Chris Yuan
International Journal of Exergy (IJEX), Vol. 15, No. 1, 2014

Abstract: In this paper, energy and exergy analyses of atomic layer deposition (ALD) of Al₂O₃ nano-film has been conducted. First, based on the first law of thermodynamics, the energy flow in ALD of Al₂O₃ nano-film preparation system is analysed. Second, the exergy flow in the system is analysed based on the second law of thermodynamics. Two different kinds of exergy efficiencies are introduced, including the simplest definition for exergy efficiency and the degree of perfection. In the end, the exergy efficiency in this system is calculated by using the two kinds of exergy efficiency calculation methods. The results of analyses on the ALD of the Al₂O₃ nano-film process demonstrate the extremely low efficiency of energy in the ALD system. Thus, it is necessary and meaningful to find ways to reduce energy consumption and improve the energy utilisation efficiency in ALD operation process.

Online publication date: Thu, 30-Apr-2015

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