Simultaneous position and angular error measurement of precision positioning stages using miniature interferometer with step-size variation
by Samik Dutta; Chinmoy Pati; Ranjan Sen
International Journal of Precision Technology (IJPTECH), Vol. 4, No. 1/2, 2014

Abstract: Precision of machine tools is mainly dependent on positional and angular errors of the positioning stage attached to it. Those errors can be measured precisely by laser interferometers. In this work, a measurement system with a miniature interferometer of size 33 × 139 × 94 mm with 0.1 nm linear resolution and 0.002 arcsec angular resolution has been employed to measure positional and angular errors, simultaneously, of two precision positioning stages of different metrological instruments. Measurements have been taken with varying step sizes. A variation of error propagation with the change of step size has been observed.

Online publication date: Thu, 30-Apr-2015

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