Spray deposition of PVDF layers with application in MEMS pressure sensors
by Georgi D. Kolev; Mariya P. Aleksandrova; Krassimir H. Denishev
International Journal of Reasoning-based Intelligent Systems (IJRIS), Vol. 5, No. 3, 2013

Abstract: Layers of piezoelectrical polymer polyviniliden fluoride (PVDF) were prepared by spray deposition technique on silicon, glass substrates and glass substrates with thin aluminium (Al) and cooper (Cu) films. The deposition temperature of the substrates and the concentration of the solution were investigated and their influence on the adhesion to the surface and the film's morphology were explored. The pre- and post deposition temperature treatment of the sample was conducted and the changes in the layer's behaviour was detected.

Online publication date: Mon, 09-Dec-2013

The full text of this article is only available to individual subscribers or to users at subscribing institutions.

 
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.

Pay per view:
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.

Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Reasoning-based Intelligent Systems (IJRIS):
Login with your Inderscience username and password:

Username:        Password:          Forgotten your password?

Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.

If you still need assistance, please email subs@inderscience.com