Study on control algorithm of micro-displacement platform
by Meng Shao; Sai-nan Wang; Jing Shen; Jing Dai; Yu-hou Wu
International Journal of Modelling, Identification and Control (IJMIC), Vol. 20, No. 2, 2013

Abstract: The control system of high precision micro-displacement platform has been designed according to the high precision, high speed and high stability requirements. A hardware platform of the control system has been established with TMS320C6713 DSP chip, XC95144 CPLD chip, CY7C68013 USB chip and 24-bit A/D chip, D/A chip. An improved PID control algorithm was put forward, including set-value weighting control algorithm, resisting saturation of integral with tracking coefficient control algorithm, differential forward control algorithm and incomplete differential control algorithm. The algorithm is simulated in the MATLAB environment. The results show that this control system has high control accuracy, fast response, non-overshoot and strong stability. The algorithm is programmed and loaded into the DSP chip to the control the micro-displacement platform. When the set-value is 1 micron, the displacement platform can move to 1 micron quickly, and the adjustment time is 14 microseconds.

Online publication date: Sat, 27-Sep-2014

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