Deposition temperature effects on optical and structural properties of amorphous silicon carbide films
by Saloua Merazga; Amer Brighet; Aissa Keffous; Kamel Mirouh; Lakhder Guerbous; Youcef Belkacem; Mohamed Kechouane
International Journal of Nanotechnology (IJNT), Vol. 10, No. 5/6/7, 2013

Abstract: Hydrogenated amorphous silicon carbide thin films (a-SiC:H) were elaborated by DC magnetron sputtering technique by using 6H-SiC as target. The a-SiC:H films of 0.9-1.5 µm thicknesses were deposited at different temperatures of 250, 350, 450 and 550°C on p-type Si(100) and Corning glass 9075 substrates. The deposited films (a-SiC:H) were investigated by Infrared Spectroscopy (FTIR), spectrophotometry (UV-visible-NIR), Secondary Ion Mass Spectrometry (SIMS), and photoluminesence spectroscopy. The previous results of the FTIR measurements reveal the existence of a band located at 775 cm−1, which corresponds to Si-C stretching vibration of SiC amorphous, whereas the Si-C bonds of SiC crystalline is around 810 cm−1. The optical gap varies between 1.9 and 2.10 eV as a function of films' thicknesses and temperature. In addition, the PL spectra of the elaborated films show that the intensity increases when the deposition temperature increases.

Online publication date: Sat, 27-Apr-2013

The full text of this article is only available to individual subscribers or to users at subscribing institutions.

 
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.

Pay per view:
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.

Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Nanotechnology (IJNT):
Login with your Inderscience username and password:

    Username:        Password:         

Forgotten your password?


Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.

If you still need assistance, please email subs@inderscience.com