Research on CMP performances of flower-like porous alumina abrasives with different pore sizes
by Naijing Bu
International Journal of Abrasive Technology (IJAT), Vol. 5, No. 3, 2012

Abstract: Flower-like porous alumina abrasives with different pore sizes were synthesised by hydrothermal synthesis method and characterised using transmission electron microscopy (TEM) and nitrogen sorption methods. Then the chemical mechanical polishing (CMP) performances on hard disk substrates were studied. The results showed that the increase of rotation speed and down force could enhance the material removal amount (MRA). It was also found that the proper pore size (6.27 nm) had advantages in MRA and surface planarisation.

Online publication date: Wed, 30-Jul-2014

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