Preparation of porous alumina-titania abrasive and its chemical mechanical polishing behaviour on hard disk substrate Online publication date: Wed, 30-Jul-2014
by Naijing Bu; Hong Lei
International Journal of Abrasive Technology (IJAT), Vol. 5, No. 2, 2012
Abstract: Porous alumina-titania abrasive was prepared via cooperative self-assembly of titanium (IV) isopropoxide and aluminum isopropoxide in the presence of a soft template by the sol-gel method. The resulting abrasive was characterised by energy dispersive spectrometer (EDS), transmission electron microscope (TEM) and nitrogen adsorption analyses. Then the chemical mechanical polishing (CMP) behaviours of the as-prepared porous alumina-titania abrasive on hard disk substrate were investigated. The CMP test results showed that the surface polished by the slurry containing the porous alumina-titania abrasive exhibited lower surface average roughness (Ra), less scratch as well as lower topographical variations than those by the slurry containing the solid alumina abrasive at the same conditions.
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