Dielectric enhancement of Ba_0.7Sr_0.3TiO₃/Ba_0.5Sr_0.5TiO₃ multilayered thin films fabricated by chemical solution deposition
by Qing Chang; Jianming Dai; Xuebin Zhu; Dajun Wu; Weijie Zhang; Yuping Sun
International Journal of Nanoparticles (IJNP), Vol. 5, No. 1, 2012

Abstract: Multilayered Ba_0.7Sr_0.3TiO₃/Ba_0.5Sr_0.5TiO₃ thin films with different deposition sequences were deposited on Pt/Ti/SiO₂/Si substrates by chemical solution deposition method. Obvious dielectric enhancement occurred in Ba_0.7Sr_0.3TiO₃/Ba_0.5Sr_0.5TiO₃ multilayered thin films due to Maxwell-Wagner affect, but not happened in Ba_0.5Sr_0.5TiO₃/Ba_0.7Sr_0.3TiO₃ multilayered thin films because of the different interface quality caused by different deposition sequences. The dielectric constant and tunability of Ba_0.7Sr_0.3TiO₃/Ba_0.5Sr_0.5TiO₃ multilayered thin films at 200 kHz (590 and 46%, respectively) were higher than that of Ba_0.7Sr_0.3TiO₃ and Ba_0.5Sr_0.5TiO₃ monolayer thin films (470, 32% and 430, 29%, respectively). Besides, the dielectric loss tangent of Ba_0.7Sr_0.3TiO₃/Ba_0.5Sr_0.5TiO₃ multilayered thin films (0.025) was lower than that of Ba_0.7Sr_0.3TiO₃ and Ba_0.5Sr_0.5TiO₃ monolayer thin films (0.033, 0.052, respectively). Comparing with that of Ba_0.7Sr_0.3TiO₃ and Ba_0.5Sr_0.5TiO₃ monolayer thin films, the dielectric properties of Ba_0.7Sr_0.3TiO₃/Ba_0.5Sr_0.5TiO₃ multilayered thin films had certain of improvement, which is of benefit to applications in tunable microwave devices.

Online publication date: Wed, 20-Aug-2014

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