Modelling and analysis of semiconductor manufacturing in a shrinking world: challenges and successes
by Chen-Fu Chien, Stephane Dauzere-Peres, Hans Ehm, John W. Fowler, Zhibin Jiang, Shekar Krishnaswamy, Tae-Eog Lee, Lars Monch, Reha Uzsoy
European J. of Industrial Engineering (EJIE), Vol. 5, No. 3, 2011

Abstract: This paper presents a brief overview of semiconductor manufacturing followed by the results of a panel session held at the Fourth International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) in Miami, December 10, 2008 on the role of modelling and analysis in semiconductor manufacturing in a shrinking world. Three participants are from Asia, two from Europe, and two from the USA in addition to the two panel organisers (Fowler and Mönch). At least one panellist from each continent is from industry and one from academia. The statements of the panellists from industry relate to modelling and analysis problems found in their own companies. Those of the academic panellists describe the role that modelling and analysis has played and is expected to play in their semiconductor manufacturing research. Their views on the challenges and successes of modelling and analysis in a globalised world are also included. Finally, we identify some future research challenges for semiconductor manufacturing. [Received: 01 March 2010; Revised: 16 April 2010; Accepted: 01 May 2010]

Online publication date: Wed, 22-Oct-2014

The full text of this article is only available to individual subscribers or to users at subscribing institutions.

 
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.

Pay per view:
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.

Complimentary Subscribers, Editors or Members of the Editorial Board of the European J. of Industrial Engineering (EJIE):
Login with your Inderscience username and password:

Username:        Password:          Forgotten your password?

Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.

If you still need assistance, please email subs@inderscience.com