Application of modern high resolution tactile sensors for micro-objects Online publication date: Wed, 06-Apr-2011
by A. Weckenmann, A. Schuler
International Journal of Precision Technology (IJPTECH), Vol. 2, No. 2/3, 2011
Abstract: Following the miniaturisation of electrical, mechanical and optical components, the demands on metrological quality control are increasing. Several measurement principles are available for micro- and nanometrology, yet, are usually limited to 2D or 2.5D measurements. But recent micro-objects used for automotive and medical applications hold 3D features, raising the need for full 3D capability. Today, only micro tactile probing systems can meet this requirement with the demanded precision. Due to physical limitations, a simple miniaturisation of available tactile probes is not possible. Several side effects of macro scale tactile probing disproportionately rise and new effects gain influence. To adapt tactile probing to nanometrology, new designs and working principles are necessary to achieve nanometer resolution. Even principles with negligible or even no probing force were achieved. Promising designs of different institutes are shown as also own work in this field.
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