Micromachining of silicon with excimer laser in air and water medium
by Alok Kumar Das, Partha Saha
International Journal of Manufacturing Technology and Management (IJMTM), Vol. 21, No. 1/2, 2010

Abstract: Laser micromachining of silicon was performed by KrF excimer laser, utilising the beam energy density (fluence) in the range of 1.33-5 J/cm². Experiments were conducted on silicon wafer surface both in air and water medium. A qualitative study of the surface topography was carried out from the micrographs of the different machined spots. A mathematical model was developed to represent the process. The ablation/etch depth is found to increase rapidly with increase in laser fluence after a threshold value. The variation is nonlinear, irrespective of the surface topography and it gets a saturation value at higher fluence.

Online publication date: Sat, 31-Jul-2010

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