Titanium oxidation by RF inductively coupled plasma
by R. Valencia-Alvarado, R. Lopez-Callejas, S.R. Barocio, A. Mercado-Cabrera, R. Pena-Eguiluz, A.E. Munoz-Castro, A. De la Piedad-Beneitez, J.M. De La Rosa-Vazquez
International Journal of Nanomanufacturing (IJNM), Vol. 5, No. 1/2, 2010

Abstract: We report on recent results obtained from the oxidation process of pure titanium substrates carried out in up to 500 W plasmas contained in a cylindrical Pyrex vessel inductively coupled to a 13.56 MHz RF generator, in gas pressures varying from ~10⁻³ to 10⁰ mbar with the samples being biased down to -3,000 V DC. The experimental outcome is of particular interest to the medical sector as it concerns the production of biomaterials required by prosthesis and implants. The plasma was developed from a 20% oxygen and 80% argon gas mixture and applied for ~6 hour processing periods. The sample temperature was controlled by means of the gas pressure, the plasma power and the bias voltage. Thus, the best quality oxidation was accomplished at 5 × 10⁻² mbar and 680°C where the implantation/diffusion of oxygen attracts the lowest rate of sputtering. Thus, the rutile phases of TiO₂ and α-TiO were produced with ~66 at. % oxygen contents corresponding to an O/Ti ratio close to 1.94 on the surface and a 5 μm thick modified layer.

Online publication date: Thu, 03-Dec-2009

The full text of this article is only available to individual subscribers or to users at subscribing institutions.

 
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.

Pay per view:
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.

Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Nanomanufacturing (IJNM):
Login with your Inderscience username and password:

Username:        Password:          Forgotten your password?

Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.

If you still need assistance, please email subs@inderscience.com