Thin film Indium Tin Oxide acetone sensor Online publication date: Thu, 19-Nov-2009
by H.J. Pandya
International Journal of Signal and Imaging Systems Engineering (IJSISE), Vol. 2, No. 1/2, 2009
Abstract: Indium Tin Oxide (ITO) thin films have been grown on glass substrates using a direct evaporation method. After deposition, two gold pads were added on the top to make electrical contact to the sensing film. The operating temperature of the sensor was optimised at 673 K and exposed to acetone vapour in air (200-1000 ppm). Furthermore, the response of the film with an added catalytic layer was investigated. It was observed that the catalytic layer increased the sensitivity (S) from 0.8 to 0.9 as calculated from the formula S = (Rair – Rgas)/Rgas. Also, the selectivity of thin film sensors to acetone vapour was 0.9 when compared with 0.6, 0.5 and 0.4 for methanol, butanol and ethanol vapour, respectively.
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