Design and simulation of a nano-scale micro positioning stage
by Xie Xiaohui, Du Ruxu, Sun Qiang
International Journal of Modelling, Identification and Control (IJMIC), Vol. 7, No. 1, 2009

Abstract: Micro positioning stage is a commonly used platform for MEMS. In this article, we present a new micro positioning stage including its design, simulation and optimisation. The new micro positioning stage is made of four sets of two leaf springs. The geometric dimensions are determined by optimisation. Its performance, including stress and displacement, is evaluated using finite element analysis by ANSYS. The simulation results indicated that the new design can reliably achieve nano position accuracy.

Online publication date: Mon, 13-Jul-2009

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