Determination of Young's modulus and yield strength of porous low-k dielectric films by nanoindentation under complete consideration of the substrate influence
by M. Herrmann, F. Richter
International Journal of Surface Science and Engineering (IJSURFSE), Vol. 3, No. 1/2, 2009

Abstract: The capabilities of the 'effective indenter method' with respect to the characterisation of porous xerogel thin films have been investigated using samples with porosities ranging from 43% to 57%. Young's modulus of the samples was decreasing from 2.67 GPa to 0.83 GPa with growing porosity. Yield strength was determined using spherical indentation data. With a larger indenter (R = 48 μm) the 'effective indenter method' could be directly applied while for a smaller one (R = 4.2 μm) the 'effective indenter extrapolation method' had to be utilised to account for the larger amount of plastic deformation. Both approaches delivered the same yield strength decreasing from (140 ± 5) MPa to (75 ± 3) MPa with increasing porosity.

Online publication date: Wed, 01-Apr-2009

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