Study on a microlathe with visual feedback control
by Hirotaka Ojima, Libo Zhou, Jun Shimizu, Hiroshi Eda
International Journal of Abrasive Technology (IJAT), Vol. 2, No. 1, 2009

Abstract: Micromeso Mechanical Manufacturing (M4) technology has recently attracted attentions as an alternative micromachining solution because of its potentials of processing a wide range of materials into three-dimensional forms. In this research, using a microlathe, which is installable and operational in a Scanning Electron Microscope (SEM), we control the positions and movements of the cutting tool directly with visual feedback scheme from CCD camera. Unlike the conventional feedback control which positions the X–Y table only, this scheme offers a direct control of the position, path and speed to the tool tip. We compare the tool paths with/without visual feedback control, and found the error of the path with visual feedback control is within ±5 pixels (30 µm). Cutting test is performed to confirm the effect of the visual feedback control scheme and an average of difference between the resultant shape and the ideal profile is less than 10 µm.

Online publication date: Sun, 30-Nov-2008

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