Mechanical and surface properties of Ti-sputtered thin films
by G. Costanza, F. Mercuri, M.E. Tata
International Journal of Surface Science and Engineering (IJSURFSE), Vol. 2, No. 5, 2008

Abstract: The mechanical behaviour of the film and the thickness influence on the surface morphology have been studied in detail for Ti-sputtered coatings deposited at room temperature on AA6082 T6 and AA2618/20% Al₂O₃ flat samples. The intrinsic hardness and surface roughness of Ti thin films ranging from 0.5 µm to 2 µm have been investigated. The higher the coating thickness (up to 2 µm), the lower the surface roughness and the higher the intrinsic hardness of the film. The improvement of surface roughness has been achieved by Ti-sputtered clusters able to cover the micro-valleys.

Online publication date: Thu, 20-Nov-2008

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