From laser micromachining to nanomachining: considerations Online publication date: Thu, 18-Sep-2008
by Malcolm Gower
International Journal of Technology Transfer and Commercialisation (IJTTC), Vol. 7, No. 2/3, 2008
Abstract: The critical parameters that currently limit the feature sizes which are produced by lasers when micromachining materials are considered in the context of trying to extend them into the nano-regime. Fabricating structures with dimensions smaller than 100 nm by ultraviolet laser beams will require sub-wavelength focusing/imaging techniques that push lateral beam sizes to the very limits placed by light diffraction. A variety of conventional optical approaches as well as 'optical tricks' are presented for constricting laser beams to the nano-sized dimensions required for nanomachining applications. The use of superlenses, which can potentially confine laser beams to even smaller sizes than the limits set by optical diffraction, is also discussed.
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