Characterisation of tribological behaviour of silicon and ceramic coatings under repeated sliding at micro-scale
by H.R. Le, J.A. Williams, J.K. Luo
International Journal of Surface Science and Engineering (IJSURFSE), Vol. 2, No. 1/2, 2008

Abstract: Because of large surface-to-volume ratios and low restoring forces, surface stiction and friction can dominate the performance of Micro-Electro-Mechanical Systems (MEMS) currently being developed. To achieve the functionality and reliability of these devices, tribologists strive to understand the mechanisms of adhesion, friction and wear over a broad range of length scales. This paper presents the design and commission of a simple tribological test rig for the characterisation of MEMS materials from micro-scale to meso-scale. The effects of normal load, environment and various coatings on the friction and wear are explored using this rig.

Online publication date: Thu, 26-Jun-2008

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