Review of MEMS metrology solutions
by James F. Nichols, Meghan Shilling, Thomas R. Kurfess
International Journal of Manufacturing Technology and Management (IJMTM), Vol. 13, No. 2/3/4, 2008

Abstract: This paper serves as a review of current solutions for MEMS metrology. This survey provides an extensive and in-depth review of the current tools and their fundamental limitations. Techniques that are reviewed include tools that are extensions of semiconductor tools, scaled down versions of conventional metrology tools and entirely novel methods for MEMS inspection.

Online publication date: Tue, 22-Jan-2008

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