Experimental study on the processing of sapphire with a free-abrasive assisted fixed-abrasive lapping plate
by Jiyang Cao; Jiayun Deng; Jiabin Lu; Qiusheng Yan; Xiaowei Nie
International Journal of Abrasive Technology (IJAT), Vol. 11, No. 4, 2023

Abstract: To improve the lapping efficiency of the self-made fixed-abrasive lapping plate for sapphire, free-abrasives were added to the lapping solution to improve the plate's self-dressing performance to realise high-efficiency and high-quality processing for sapphire wafers. The effects of free-abrasive types, size and concentration on processing sapphire wafers were studied, and the processing mechanism of free-abrasive assisted fixed-abrasive lapping was also revealed. The results show that the material removal rate (MRR) of the sapphire wafer increases with increasing the free-abrasive hardness and the size, and first increases and then decreases with increasing concentration; the surface roughness Ra first decreases and then increases with increasing the free-abrasive hardness, increases with increasing the size and continually decrease with increasing the concentration; the lapping plate wear ratio first increases and then decreases with increasing the free-abrasive hardness and concentration and increases with increasing the size. When the free-abrasive, abrasive size and concentration are SiO₂, 20 μm, and 3 wt. %, a processed surface with Ra of 0.141 μm and MRR of 4.24 μm/min could be obtained. Compared with the lapping without free-abrasive, the MRR increased by 103.94%, the surface quality improved by 14.45%, and the plate wear ratio increased by 152.15%.

Online publication date: Tue, 30-Jan-2024

The full text of this article is only available to individual subscribers or to users at subscribing institutions.

 
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.

Pay per view:
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.

Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Abrasive Technology (IJAT):
Login with your Inderscience username and password:

Username:        Password:          Forgotten your password?

Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.

If you still need assistance, please email subs@inderscience.com