A double pass surface encoder for measurement of planar motion
by Yoji Watanabe, Wei Gao, Satoshi Kiyono
International Journal of Surface Science and Engineering (IJSURFSE), Vol. 1, No. 1, 2007

Abstract: This paper describes a double pass surface encoder, composed of a 2D sinusoidal grid and an optical sensor, for nanometer position measurement in the XY plane. By using a double pass optical layout, the sensitivity becomes twice as much as that of the single pass encoder. From a wave optics simulation, the grid amplitude of 70 nm is selected. The experimental result shows that the sensor has a resolution higher than 5 nm. The interpolation error is 0.6 µm in both the X- and Y-direction. The extrapolation errors in the X- and Y-direction are 0.18 µm and 0.23 µm.

Online publication date: Wed, 09-May-2007

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