A genetic algorithm approach to manage ion implantation processes in wafer fabrication Online publication date: Wed, 02-Jul-2003
by Shwu-Min Horng, John W. Fowler, Jeffery K. Cochran
International Journal of Manufacturing Technology and Management (IJMTM), Vol. 1, No. 2/3, 2000
Abstract: The management of ion implantation processes is one of several challenging problems in scheduling wafer fabrication facilities. A complicating factor is the fact that there are sequence dependent set-ups (e.g. species changes). Because of the set-ups, it is sometimes desirable to leave an implanter idle (if another lot requiring this species will arrive soon) rather than to change the set-up. We study the use of a genetic algorithm (GA) to assign the jobs to machines where the First In-First Out (FIFO) dispatching rule is used to schedule the individual machines. This approach is compared to the use of a commonly used dispatching policy-set-up avoidance. The parameters of the genetic algorithm (population size, crossover probability, and mutation probability) are analysed using response surface techniques to find combinations that allow the algorithm to determine a relatively good solution in a short CPU time.
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Manufacturing Technology and Management (IJMTM):
Login with your Inderscience username and password:
Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.
If you still need assistance, please email subs@inderscience.com