The study of the synthesis of carbon nanomaterials by the plasma-enhanced chemical vapour deposition method
by Ye. Yerlanuly; D.G. Batryshev; M.T. Gabdullin; T.S. Ramazanov; K.N. Ibrashev; W. Kang
International Journal of Nanotechnology (IJNT), Vol. 18, No. 9/10, 2021

Abstract: In this work, the results of a study of the synthesis of carbon nanomaterials by plasma-enhanced chemical vapour deposition at various plasma parameters, including at low discharge powers, are presented. Different types of carbon nanomaterials were synthesised in the plasma of radio-frequency (RF) discharge. The dependence of the obtained type of carbon nanostructure on the synthesis parameters (medium temperature and RF discharge power) was experimentally shown. The Raman spectroscopy analysis of obtained samples showed that the more defective structure among obtained samples is observed for carbon nanowalls. One of the possible reasons for this is the vertical orientation of graphene sheets and the appearance of edge effects. Based on the analysis of the obtained results of scanning electron microscope (SEM) images and the Raman spectrum, a process map for the synthesis of carbon nanomaterials was developed as an RF discharge power function of temperature, where various zones, in particular, carbon nanoparticles, carbon nanofibres, carbon nanowires, and multilayer graphene zones, were marked.

Online publication date: Wed, 13-Oct-2021

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